Chang, C. Y. <br/><br/>
ULSI Technology 

 - New York :  The McGraw-Hill Companies,Inc.  c1996. 
 - xxv, 726 p.:  [F6] 
<br/><br/>This book is having appendixes. 
<br/><br/><label>ISBN: </label>0071141057 
<br/><br/><label>Dewey Class. No.: </label>621.395  / CHA/SZE/ULS