TY  - BOOK
AU  - Chang, C. Y.
AU  - Sze, S. M., 
TI  - ULSI Technology
SN  - 0071141057
U1  - 621.395 
PY  - 1996///
CY  - New York
PB  - The McGraw-Hill Companies,Inc.
N1  - This book is having appendixes
ER  -