May, Gary S., <br/><br/>
Fundamentals of Semiconductore Fabrication 

 - New Delhi :  John Wiley & Sons, Inc.,  c2004. 
 - xii, 305 p.:  ill.; 
<br/><br/>This book having Appendixes 
<br/><br/><label>ISBN: </label>981253072x 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAY/FUN