TY  - BOOK
AU  - May, Gary S.,
AU  - Sze, S. M., 
TI  - Fundamentals of Semiconductore Fabrication
SN  - 981253072x
U1  - 621.38152 
PY  - 2004///
CY  - New Delhi
PB  - John Wiley & Sons, Inc.
N1  - This book having Appendixes
ER  -