Hsu, Tai-Ran., <br/><br/>
MEMS & Microsystems  Design and Manufacture 

 - New Delhi :  Tata McGraw-Hill Publishing Company Limited, 
 - xii, 436 p.:  [D5] 
<br/><br/>This book is having a bibliography 
<br/><br/><label>ISBN: </label>007048709x 
<br/><br/><label>Dewey Class. No.: </label>621.381  / HSU/MEM