Ghandhi, Sorab K., <br/><br/>
VLSI Fabrication Principles:  Silicon and Gallium Arsenide 

 - 2nd ed. 
 - New York :  John Wiley & Sons Inc,  c1994. 
 - xxiv, 834 p.:  [D4] 
<br/><br/>This book is having appendixes. 
<br/><br/><label>ISBN: </label>9788126517909 
<br/><br/><label>Dewey Class. No.: </label>621.381  / GHA/VLS