TY  - BOOK
AU  - Ghandhi, Sorab K.,
TI  - VLSI Fabrication Principles: Silicon and Gallium Arsenide
SN  - 9788126517909
U1  - 621.381 
PY  - 1994///
CY  - New York
PB  - John Wiley & Sons Inc
N1  - This book is having appendixes
ER  -