Madou, Marc.  <br/><br/>
Fundamentals of Microfabrication  

 - Boca Raton :  CRC Press,   c1997.  
 - 589 p.:  ill.; 
<br/><br/>This book is having Appendix from page no 515 to 571.  
<br/><br/><label>ISBN: </label>0849394511 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAD/FUN