TY  - BOOK
AU  - Madou, Marc. 
TI  - Fundamentals of Microfabrication 
SN  - 0849394511
U1  - 621.38152 
PY  - 1997///.
CY  - Boca Raton
PB  - CRC Press, 
N1  - This book is having Appendix from page no 515 to 571.
ER  -