000 00387nam a22001457a 4500
020 _a0071141057
082 _a621.395
_bCHA/SZE/ULS
100 _aChang, C. Y.
_94047
245 _aULSI Technology
260 _aNew York :
_bThe McGraw-Hill Companies,Inc.
_cc1996.
300 _axxv, 726 p.:
_b[F6]
504 _aThis book is having appendixes.
700 _aSze, S. M.,
_9595
942 _cBK
999 _c3621
_d3621