| 000 | 00405nam a22001457a 4500 | ||
|---|---|---|---|
| 020 | _a981253072x | ||
| 082 |
_a621.38152 _bMAY/FUN |
||
| 100 |
_aMay, Gary S., _94112 |
||
| 245 | _aFundamentals of Semiconductore Fabrication | ||
| 260 |
_aNew Delhi : _bJohn Wiley & Sons, Inc., _cc2004. |
||
| 300 |
_axii, 305 p.: _bill.; |
||
| 504 | _aThis book having Appendixes | ||
| 700 |
_aSze, S. M., _9595 |
||
| 942 | _cBK | ||
| 999 |
_c3688 _d3688 |
||