000			00422nam a22001457a 4500
020			_a0195136055
082			_a621.38152 _bCAM/THE
100			_aCampbell, Stephen A., _94298
245			_aThe Science and Engineering of Microelectronic Fabrication
250			_a2nd ed.
260			_aNew York : _bOxford University Press, _cc2001.
300			_axiv, 603 p.: _bill.;
504			_aThis book is having appendixes.
942			_cBK
999			_c3893 _d3893