| 000 | 00389nam a22001337a 4500 | ||
|---|---|---|---|
| 020 | _a007048709x | ||
| 082 |
_a621.381 _bHSU/MEM |
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| 100 |
_aHsu, Tai-Ran., _94324 |
||
| 245 |
_aMEMS & Microsystems _bDesign and Manufacture |
||
| 260 |
_aNew Delhi : _bTata McGraw-Hill Publishing Company Limited, |
||
| 300 |
_axii, 436 p.: _b[D5] |
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| 504 | _aThis book is having a bibliography | ||
| 942 | _cBK | ||
| 999 |
_c3926 _d3926 |
||