000 00380nam a22001337a 4500
020 _a9781596932463
082 _a621.381
_bBAK/INT
100 _aBakir, Muhannad S.,
_9724
245 _aIntegrated Interconnect Technologies for 3D Nanoelectronic Systems
260 _aBoston :
_bArtech House,
_cc2009.
300 _axx, 528 p.:
_bill.;
700 _aMeindl, James D.,
_9725
942 _cREF
999 _c505
_d505