000 00436nam a22001457a 4500
003 OSt
005 20221125154253.0
008 160519b xxu||||| |||| 00| 0 eng d
040 _aDBITLRC
_bEnglish
_cDBITLRC
082 _222
_a621.38173
_bAKT/INN
100 _97455
_aAktiengesellschaft, Siemens
245 _aInnovation Through Microelectronics
_bState of the art of a fundamental technolgy
300 _a101 p.:
_bill.;
942 _2ddc
_cBOOK
999 _c6598
_d6598