000 00294nam a22001097a 4500
082 _a621.381046
_bMOT/MOE
100 _aMotamedi, Manouchehr E.,
_97696
245 _aMoems
_bMicro-Opto-Electro-Mechanical Systems
260 _aUSA :
_bNew Age,
_cc2010.
300 _axvi, 614 p.:
_bill.;
942 _cREF
999 _c6900
_d6900