| 000 | 00346nam a22001217a 4500 | ||
|---|---|---|---|
| 020 | _a9788179928998 | ||
| 082 |
_a621.38 _bHEL/HAN |
||
| 100 |
_aHelbert,John N., _97764 |
||
| 245 |
_aHandbook of VLSI Microlithography _bprinciples, technology, and applications |
||
| 260 |
_aDelhi _bJaico Publishing House _c2009 |
||
| 300 |
_a1001p. _b[D1] |
||
| 942 | _cBK | ||
| 999 |
_c6945 _d6945 |
||